Wafer transfer robots

asamikawano — Tue, 08 Feb 2022 05:10:10 +0000

Kawasaki’s wafer transfer robots boast the world’s largest share.
They are compliant with the SEMI-F47 and SEMI-S2 standards and can access 3 to 4 FOUPS without a track.

NTJ series

Original drive mechanism provides highly accurate and smooth operations.

NTJ10

Payload —
Max. Reach 1067.2mm
Applications —
Robot Category Wafer transfer robots
Mounting Floor
Series NTJ series

Payload —
Max. Reach 1067.2mm
Applications Silicon Wafer Handling
Robot Category Wafer transfer robots
Mounting Floor
Series NTJ series

TTJ series

High-speed transfer in high and low pass-lines, thanks to a unique highrigidity telescopic mechanism.

TTJ10

Payload —
Max. Reach 1067.2mm
Applications Silicon Wafer Handling
Robot Category Wafer transfer robots
Mounting Floor
Series TTJ series

Payload —
Max. Reach 1067.2mm
Applications Silicon Wafer Handling
Robot Category Wafer transfer robots
Mounting Floor
Series TTJ series

NTH series

The long arm that is offset from the center of the base can access 4FOUP without a track.

NTH20

Payload —
Max. Reach 1226.6mm
Applications Silicon Wafer Handling
Robot Category Wafer transfer robots
Mounting Floor
Series NTH series

NX series

Installation in a small space is possible, thanks to its compact arm construction.

NX420

Payload —
Max. Reach 736mm
Applications Silicon Wafer Handling
Robot Category Wafer transfer robots
Mounting Floor
Series NX series

Wafer transfer robots | Industrial Robots by Kawasaki Robotics